Create generic Func from reflection

I've specified type in a variable: Type hiddenType. I need to create a Func<T> delegate where T is of type specified in mentioned variable and assign an method:

var funcType = typeof(Func<>).MakeGenericType(hiddenType);
Func<object> funcImplementation = () => GetInstance(hiddenType);

var myFunc= Delegate.CreateDelegate(funcType , valueGenerator.Method);

It doesn't works - because funcImplementation is returns object instead of desired. At runtime, it will surely be an instance of type specified in hiddenType.

GetInstance returns object and signaure cannot be changed.